发明名称 |
Method to increase the speed of a scanning probe microscope |
摘要 |
In a scanning probe microscope having a probe moved by a piezoelectric 3-dimensional positioner in perpendicular X and Y directions over the surface of a sample to create a raster scan thereof and feedback controlled and sensed in a Z direction vertical to the surface to gather data about the topography of the surface, this is a method of operating the piezoelectric 3-dimensional positioner to increase the speed of gathering data about a scanning area of the surface being scanned. The method comprises the steps of, causing the positioner to traverse the surface from a first edge of the scanning area with the probe in a +X direction at a first rate of speed while feedback controlling and sensing the Z direction; causing the positioner to lift the probe above the surface a clearance distance at a second edge of the scanning area opposite the first edge in the +X direction; and, causing the positioner to return the probe to the first edge in a -X direction without feedback control thereof at a second rate of speed which is faster than the first rate of speed.
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申请公布号 |
US4954704(A) |
申请公布日期 |
1990.09.04 |
申请号 |
US19890445280 |
申请日期 |
1989.12.04 |
申请人 |
DIGITAL INSTRUMENTS, INC. |
发明人 |
ELINGS, VIRGIL B.;MAIVALD, PETER |
分类号 |
G01Q10/06;G01Q20/04;H01J37/26 |
主分类号 |
G01Q10/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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