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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH02221367(A)
申请公布日期
1990.09.04
申请号
JP19890042400
申请日期
1989.02.21
申请人
KOBE STEEL LTD
发明人
OKUDA MASAHIKO;OTANI TETSUYA
分类号
C23C14/34;C23C14/35
主分类号
C23C14/34
代理机构
代理人
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地址
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