| 摘要 |
<p>PROBLEM TO BE SOLVED: To establish a specimen image observing method with a scan type charged particle beam device capable of simply finding out the field of view for the specimen. SOLUTION: According to this specimen image observing method for a scan type charged particle beam device, image acquisition with a low magnification is made in a plurality of regions on a specimen 2 previously in the case of view field search mode. Image signal acquired for each region is sent to either memory element of an image memory 23 and stored there. At this time of storing, the X-Y coordinates of the specimen corresponding to the low magnification acquired are stored in memory along with the rotating angle and direction of the image when it is rotated. The video signal stored in each image memory is supplied to a cathode-ray tube 9, and a plurality of specimen images are displayed on the cathode-ray tube 9. If a specific image is selected among these specimen images displayed, a control device 15 controls a stage control unit 21 on the basis of the read coordinates and drives an X-Y stage 17, and the stage is moved so that the specimen position corresponding to the selected image lies on the optical axis of electron beam.</p> |
