A device for detecting a gaseous species including (i) a silicon substrate having two major surfaces and comprising a dielectric window region (ii) a heater situated on the dielectric window region on one major surface; and (iii) a conductivity cell electrode thin metal transducing film assembly situated on the dielectric window region on the other major surface is disclosed. The thin transducing film contacts the conductivity cell electrode.
申请公布号
US4953387(A)
申请公布日期
1990.09.04
申请号
US19890386713
申请日期
1989.07.31
申请人
THE REGENTS OF THE UNIVERSITY OF MICHIGAN
发明人
JOHNSON, CHRISTY L.;SCHWANK, JOHANNES;WISE, KENSALL D.