| 摘要 |
A vertical type heat-treating apparatus has a process tube, disposed upright along the lengthwise direction, for receiving a target object to heat-treat it under a predetermined condition, and a heater, provided around the process tube, for heating the target object in the process tube. After heat treatment is executed with the heater disposed around the process tube, the heater is moved upward by an elevator away from the process tube for cooling down the inside of the process tube.
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