发明名称 Test method of an electrostatic breakdown of a semiconductor device and an apparatus therefor
摘要 In a test method of an electrostatic breakdown of a semiconductor device in accordance with the present invention, a plurality of semiconductor devices are disposed at random on a member which has been electrostatically charged with a predetermined voltage, and the semiconductor devices are caused to be discharged while being moved on the member. Then, a test is performed to determine whether an electrostatic breakdown occurs in each of semiconductor devices. The electrical characteristics of each semiconductor device are measured after the charged static electricity has been removed. Each semiconductor device to be tested is incorporated in a package and has lead terminals connected to a semiconductor chip.
申请公布号 US4954772(A) 申请公布日期 1990.09.04
申请号 US19880167793 申请日期 1988.03.14
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 FUNAKOSHI, HARUO
分类号 G01R31/00;G01R31/26;G01R31/28;H01L21/66 主分类号 G01R31/00
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