摘要 |
PURPOSE:To measure the chemical species in an aq. soln. with a high sensitivity and to allow the specific measurement in the biochemical field in particular by coating a conductive high polymer with a film having a property to shut off water and having permeability. CONSTITUTION:Two electrodes 2 are provided on a silicon wafer 1 coated with a silicon dioxide film and the part 3 on the outside of a dotted line frame is formed with a coating film 4 consisting of a photoresist. An electrolysis is effected in perchloric acid by using the electrode 2 as an anode by which the electrode 2 is electrically connected with the conductive high polymer 5. The film 6 which shuts off the water is installed between the high polymer 5 and the aq. soln. The high polymer 5 is protected from the aq. soln. in this way and the chemical species in the aq. soln. are easily detected with gas, such as oxygen or ammonia, as a medium. Further, the molecules having the material to bond specifically with the material to be measured are mixed on the film 6 and a generally known operation is carried out as an enzyme immunoassay method, by which the concn. of the material to be measured is measured. |