Diamond pen type marking device for substrates

摘要

This invention relates to a pen type marking device whose marking pen tip is made of diamond and which is used for marking necessary for production control and quality control of substrates such as wafers. It features that said diamond pen type marking device is provided with a rotary absorption disk in order to take out a substrate on the main stage which is located with right angle to a substrate passage almost at the middle position of said substrate passage from a loading station to an unloading station the rotary absorption disk is furnished with a pair of absorption through-holes at the peripheral part thereof and rotated by 180 degrees intermittently, thereby continuously providing substrates to the main stage, said main stage is furnished with a pen means and its control means thereon, said pen means is of a diamond pen in a pen supporting cylinder thereof, and said pen supporting means is so composed that its pen impression pressure and pen drop speed can be freely changed by means of electric control circuits according to objectives to be marked.