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发明名称
MASK FOR ION IMPLANTATION
摘要
申请公布号
JPH02222138(A)
申请公布日期
1990.09.04
申请号
JP19890042805
申请日期
1989.02.22
申请人
SUMITOMO ELECTRIC IND LTD
发明人
YAMADA TORU
分类号
H01L21/266
主分类号
H01L21/266
代理机构
代理人
主权项
地址
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