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发明名称	FORMATION OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH02220431(A)	申请公布日期	1990.09.03
申请号	JP19890039277	申请日期	1989.02.21
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	OHARA TAGAHIKO;OKAMOTO HIROSHI
分类号	H01L21/205;H01L21/324	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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