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发明名称
ELEMENT ISOLATION
摘要
申请公布号
JPH02220457(A)
申请公布日期
1990.09.03
申请号
JP19890042489
申请日期
1989.02.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWAI KENJI;WATABE KIYOTO;HAYASHIDE YOSHIO;MATSUURA MASAZUMI
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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