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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02220439(A)
申请公布日期
1990.09.03
申请号
JP19890041451
申请日期
1989.02.21
申请人
NEC KANSAI LTD
发明人
HIHARA KATSUMI
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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