SEMICONDUCTOR SUBSTRATE AND MANUFACTURE THEREOF,申请号JP19890039408-传众专利搜索

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发明名称	SEMICONDUCTOR SUBSTRATE AND MANUFACTURE THEREOF
摘要
申请公布号	JPH02220430(A)	申请公布日期	1990.09.03
申请号	JP19890039408	申请日期	1989.02.21
申请人	FUJITSU LTD	发明人	MOTOYAMA TAKUYUKI;INOUE RIICHI
分类号	C30B29/06;H01L21/20;H01L21/205	主分类号	C30B29/06
代理机构		代理人
主权项
地址

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