COATING DEVICE OF RESIST AND COATING THEREWITH,申请号JP19890039321-传众专利搜索

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发明名称	COATING DEVICE OF RESIST AND COATING THEREWITH
摘要
申请公布号	JPH02220429(A)	申请公布日期	1990.09.03
申请号	JP19890039321	申请日期	1989.02.21
申请人	OKI ELECTRIC IND CO LTD	发明人	SAITO TARO
分类号	G03F7/16;B05C11/08;H01L21/027	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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