CHARGED PARTICLE BEAM DEVICE,申请号JP19890041268-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号	JPH02220343(A)	申请公布日期	1990.09.03
申请号	JP19890041268	申请日期	1989.02.21
申请人	NIKON CORP	发明人	SATO YUTAKA
分类号	H01J37/20;H01J37/22	主分类号	H01J37/20
代理机构		代理人
主权项
地址

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