摘要 |
PURPOSE:To obtain a thin actuator having simple structure by exciting a cross vibrator comprising two rectangular rods crossing perpendicularly in the center with secondary perpendicular flexible vibration. CONSTITUTION:An ultrasonic actuator comprises a base 102 and a plurality of cross vibrators 101a-101c arranged two dimensionally through central fixing sections 103. The vibrator 101 comprises rectangular rods having different length and square cross section crossing perpendicularly each other in the center, and the vibrator 101 is further provided with a resilient body 104 and piezoelectric bodies 105-106. Operation of actuator can be stabilized when the rectangular rods are operated independently. |