ABRASIVE MATERIAL RECOVERING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an abrasive material recovery device for efficiently recovering abrasive particles from waste water which contains abrasive material and is discharged out in a CMP process, which is employed in a semiconductor manufacturing factory or the like. SOLUTION: An abrasive material recovering device for recovering abrasive material from waste water discharged out in a CMP process is equipped with a film-separating means, to which waste water discharged out in a CMP process is introduced and a cleaning means which rinses a concentrated water obtained by the film separating means with water.