| 摘要 |
PURPOSE:To enable engaging insertion without the occurrence of pushing force between inserting and inserted substances even if the positioning accuracy between them is inferior by providing a fluid bearing mechanism between a substance retaining mechanism main body and a substance. CONSTITUTION:Fluid is suctioned from a ring groove 19 through a conduit line 21 and a fluid suction passage 20 with a fluid suction source 22, and the weight of a substance 1 is supported by the negative pressure within the groove 19. On the other hand, since a pressurization fluid is supplied from a conduit line 17 and a fluid supply passage 16 to a gap 13 via a drawing 15 and an opening part 14 by a pressurization fluid supply source 18, and pressure within the gap 13 is reduced when the space of the gap 13 is widened, and increased when made small. Therefore, since the substance 1 is untouchably retained maintaining a given fine gap space to a holding surface 2A, the substance 1 can be freely moved to a direction along the surface 2A within a range limited with a blocking member 23, and the substance 1 at the time of insertion is guided with a taper part 4A, and alignment is automatically conducted even to an insertion position. |
