| 摘要 |
PURPOSE: To evenly transfer heat and remove the heat generated from a heating assembly by supplying heat to reactor chambers by providing a heating lamp assembly on each reactor chamber. CONSTITUTION: A heating lamp assembly has a reflector assembly housed in a housing 42 and a water manifold 41 which is connected to both ends of the reflector assembly so as to make cooling water to flow through the reflector assembly. The lamp assembly is also provided with heat lamp mounting assemblies on both sides of the reflector assembly, heating lamps 47 attached to the heat lamp mounting assemblies adjacent to the reflector assembly, and block gates mounted on the heat lamp mounting assemblies so as to direct cooling air to the lamps 47. During the operation of a CCVD reactor or while the heating lamps 47 are turned on for maintaining a heating reflector and a heating assembly at desired temperatures, the cooling water continuously flows through the reflector. |
