| 摘要 |
PURPOSE:To improve mass productivity by sequentially forming a metal layer and a dielectric layer on the surface of each vibrator which is molded with resin, and forming electrodes at the specified part on the dielectric layer. CONSTITUTION:Each vibrator 1 is molded with an epoxy resin and the like. A metal plated layer 2 comprising Ni and the like is formed on the surface of the vibrator 1. Then, a dielectric layer 3 comprising BaTiO2 is formed on the plated layer 2. Au and the like are plated on the specified part of the dielectric layer 3, and electrodes 4 and 5 are formed. A specified DC voltage is applied across the plated layer 2 and the electrode 4. Thus the specified polarities for driving or detecting piezoelectric elements for a vibrating gyroscope are set. Thereafter, a supporting shaft is inserted into a supporting shaft hole 1a and fixed. Specified lead wires are connected to the electrodes 4 and 5. When an AC driving voltage is applied across the electrode 4 and the plated layer 2, a part which is held between the electrode 4 and the plated layer 2 is expanded, contracted and vibrated by the piezoelectric effect, and the vibrator 1 is vibrated. The vibration on the detecting side when Colioris force acts is detected based on the output voltage from the electrode 5. |
