| 摘要 |
A spatial light modulator having one or more deflection limiting mechanisms and process for fabrication therefor. In one embodiment, the mirror support structure has rigid deflection stoppers that limit the tilt angle of the reflective plate. The mirror support structure may also include an attraction electrode that is attached to the back-side of the reflective plate such that the reflective plate may be selectively actuated by electrostatic force. Alternatively, a deflection stopping mechanism can be provided separate from the mirror support structure. The deflection stopping mechanism can be used in conjunction with one or more additional stopping mechanisms such as the abutment of a portion of the reflective plate against the substrate upon which it was constructed. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.
|
