| 摘要 |
PROBLEM TO BE SOLVED: To obtain a solvent drying system for introducing normal temperature supply air from an air supply nozzle in which solvent vapor is prevented from condensing at the air supply nozzle. SOLUTION: The solvent drying system comprises a conveyor 4 for conveying a substrate 1 coated with paste 2, a plurality of heater units 6 each provided with a solvent drying heater 5 for evaporating solvent contained in the paste 2 by heating the substrate 1, a plurality of air supply units 8 disposed alternately to the heater units 6 where each air supply unit 8 is provided with a nozzle 7 supplying normal temperature supply air 12 for carrying away the evaporated solvent vapor 15, and a section 10 for exhausting the solvent vapor 15 and the supply air 12, all of which are disposed in a drying furnace 3. A plate 16 covering the air supply unit 8 from the underside and shielding the air supply nozzle 7 from the solvent vapor 15 is disposed between the heater units 6. The shield plate 16 is provided, in the bottom thereof, with a slit 17 for passing the supply air 12 and disposed such that the temperature in the vicinity of the air supply slit 17 becomes not lower than the dew point of the solvent.
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