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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH02216864(A)
申请公布日期
1990.08.29
申请号
JP19890037391
申请日期
1989.02.17
申请人
NEC IC MICROCOMPUT SYST LTD
发明人
OTA TETSUYA
分类号
H01L21/822;H01L21/82;H01L27/04;H01L27/118
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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