| 摘要 |
PROBLEM TO BE SOLVED: To improve irradiation precision of a charged beam by eliminating inclination of a charged beam column provided to a charged beam device, and to improve maintainability and assembly reproducibility. SOLUTION: A charged beam column 1 of the charged beam device is provided on a column support 18 which is provided straddling over a vacuum chamber 12, and air-tightness with the vacuum chamber 12 is kept through a flexible body 17 such as a bellows, accordion-folding, or the like.
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