| 摘要 |
PURPOSE:To achieve a higher gas sensitivity with a satisfactory electrochemical reaction of a gas to be inspected by providing numerous protrusions and recesses on a working pole in which a gas to be inspected causes an electrochemical reaction to increase an substantial effective area of an electrode significantly. CONSTITUTION:An insulation substrate 10 employs various substrate materials having an insulating property such as glass or aluminaceramics. Numerous cubic protrusions (a) are formed on a flat surface of the substrate 10. To form the protrusions (a) on the substrate 10, an Si substrate is used for the substrate material and working for protrusions and recesses is performed using an Si microprocessing technique to form fine and exact protrusions and recesses efficiently. Then, the numerous protrusion and recesses of a working pole 20 provide as whole a field where a gas to be inspected causes an electrochemical reaction and a substantial effective area of an electrode increases significantly thereby achieving a higher gas sensitivity of a sensor. In addition, the gas to be inspected can reach the electrode passing through a solid electrolyte layer not only from the upper side of the protrusions and recesses but also from the side thereof thereby enabling efficient utilization of a surface area of the electrode thus increased by the protrusion and recesses. |
