| 摘要 |
PURPOSE:To obtain a thin film magnetic head with good yield in which high frequency characteristics are excellent, the reliability is good and the life is long, by using an organic polymer at least for a part of insulating filling member coating at least a part of a conductor coil. CONSTITUTION:Aluminum thin film is chemically etched to form a conductor coil 4 and polyimide resin is coated in 5-10mum thickness on the coil 4 as an insulating filling member 5 with a spin coating method, and film is formed with heat treatment. The polyimide resin PIQ is chemically etched and further, the alumina film 2 is chemically etched and ''Permalloy '' thin film is formed by forming an alumina 8 at the head tip on the film 2 to form the ''Permalloy '' thin film as an upper magnetic substance 9. The adhesion of ''Permalloy '' is carried out at about <=200 deg.C. |
