SURFACE WAVE LAUNCHERS TO PRODUCE PLASMA COLUMNS AND MEANS FOR PRODUCING PLASMA OF DIFFERENT SHAPES

摘要

The present invention relates to a device for generating plasma (ionizing gas) by a propagating surface wave. The device comprises a wave launching structure mounted on a plasma vessel and connected to an impedance matching network. The latter comprises a coupler and a tuner which is either formed by a section of a transmission line or is of the lumped circuitry type. The launching structure may either generate an azimuthally symmetric or a non symmetric propagating wave. This invention also relates to a method and a device for shaping plasma which comprises a plasma vessel receiving a surface wave generator and having a usable portion of a size and/or shape substantially different from the shape and/or size of the portion of the plasma vessel receiving the wave generator.