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发明名称
THIN-FILM MANUFACTURING APPARATUS
摘要
申请公布号
JPH02214112(A)
申请公布日期
1990.08.27
申请号
JP19890034623
申请日期
1989.02.14
申请人
BABCOCK HITACHI KK
发明人
NISHIHARA HIDEAKI;ADAKA SABURO;IWASAKI ATSUSHI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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