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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH02214167(A)
申请公布日期
1990.08.27
申请号
JP19890033585
申请日期
1989.02.15
申请人
HITACHI LTD
发明人
TAKEDA TOSHIFUMI
分类号
H01L21/8247;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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