| 摘要 |
PURPOSE:To enable the titled device to be excellent in high-repetition characteristic with high output and high efficiency by a method wherein the back of the first main electrode is equipped with an insulation electrode substrate which isolates the laser gas atmosphere from outside it, and a capacitor is arranged close to the first main electrode on the opposite side of this electrode via that insulation electrode substrate. CONSTITUTION:The capacitor 6 is arranged close to the first main electrode 1 via insulation electrode substrate 26 on the opposite side of this electrode 1, i.e. outside the laser gas atmosphere. One end of the capacitor 6 is electrically connected to a reserve ionization electrode 5, and the other end to the first main electrode 1 via conductive plate 25. The basic action as the laser oscillator is the same as in the conventional case. However, installation of a peaking capacitor 6 outside the laser gas atmosphere eliminates the problem of deterioration of laser gas caused with different surface materials of the peaking capacitor 6. Besides, the same cause simplifies the structure in a laser casing 15 and the maintenance facilitates in the exchanges of the peaking capacitor 6. |
