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经营范围
发明名称
SURFACE TREATMENT APPARATUS
摘要
申请公布号
JPH02214119(A)
申请公布日期
1990.08.27
申请号
JP19890034365
申请日期
1989.02.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWAI KENJI;FUJIWARA NOBUO
分类号
C23F4/00;H01L21/205;H01L21/302;H01L21/31
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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