KANKOSEIJUSHITOFUSOCHI,申请号JP19840144722-传众专利搜索

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发明名称	KANKOSEIJUSHITOFUSOCHI
摘要
申请公布号	JPH0237687(B2)	申请公布日期	1990.08.27
申请号	JP19840144722	申请日期	1984.07.10
申请人	MITSUBISHI ELECTRIC CORP	发明人	KAWAI AKIRA
分类号	B05C11/08;B05C5/00;G03F7/16;H01L21/027;H01L21/30	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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