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发明名称
DEFECT INSPECTING DEVICE
摘要
申请公布号
JPH02213764(A)
申请公布日期
1990.08.24
申请号
JP19890033608
申请日期
1989.02.15
申请人
HITACHI LTD
发明人
OTAKA MASAHIRO;TAKAKU KAZUO;HASEGAWA KUNIO;YOSHIMURA TOSHIHIKO;ISHIKAWA YUICHI;OGUCHI YUKO;HIRANO AKIHIKO;SHIMIZU TASUKU
分类号
G01R33/12;G01N27/82
主分类号
G01R33/12
代理机构
代理人
主权项
地址
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