| 摘要 |
An optical displacement sensor, for example a vibration sensor or accelerometer, in which the relative displacement of a resilient sensing element, such as a diaphragm (5), in response to an external stimulus applied to the sensor, is detected by a Fabry-Perot interferometer (2), and in which one of the mirrors (6) of the interferometer is mounted on the sensing element and the other mirror is formed by the adjacent or distal end of an optical fibre (4) via which the interferometer is illuminated or energised. The means mounting the diaphragm, comprises a housing (1) which may be adapted to be coupled to the external stimulus to be sensed, and the optical fibre (4), which is preferably a mono-mode optical fibre, may also be supported by the housing in a capillary tube (7) so that its optical axis corresponds to the optical axis of the mirror. Another embodiment of the invention comprises a back-to-back configuration in which mirror image Fabry-Perot optical cavities are arranged on either side of a resilient diaphragm sensing element. |
