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发明名称
COMPOUND FILM FORMATION METHOD
摘要
申请公布号
JPH02213135(A)
申请公布日期
1990.08.24
申请号
JP19890032766
申请日期
1989.02.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOSHIRAKAWA NOBUTAKA
分类号
H01L21/31;H01L21/203;H01L21/314
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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