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发明名称
DEVICE FOR INSPECTING SAMPLE
摘要
申请公布号
JPH02213746(A)
申请公布日期
1990.08.24
申请号
JP19890035347
申请日期
1989.02.14
申请人
CANON INC
发明人
AZUMAYA YOSHIYUKI
分类号
G01N33/49;G01N15/14
主分类号
G01N33/49
代理机构
代理人
主权项
地址
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