ETCHANT AND ETCHING METHOD,申请号JP19890033962-传众专利搜索

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发明名称	ETCHANT AND ETCHING METHOD
摘要
申请公布号	JPH02213134(A)	申请公布日期	1990.08.24
申请号	JP19890033962	申请日期	1989.02.14
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	IDOTA TAKESHI;TAKEUCHI YOSHINORI
分类号	H01L21/308;H01L21/306	主分类号	H01L21/308
代理机构		代理人
主权项
地址

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