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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JPH0237090(B2)
申请公布日期
1990.08.22
申请号
JP19810108064
申请日期
1981.07.10
申请人
FUIRITSUPUSU FURUUIRANPENFUABURIKEN NV
发明人
FURANSHISUKASU HYUUBERUTASU MARII SANDAASU;YOZEFU ARUPPONSU MARII SANDAASU;YAN DEIIRUMAN
分类号
H01L21/302;H01L21/3065;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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