Plasma forming electrode and method of using the same.

摘要

In as far, plasma forming apperatus, an electrode of the kind, used in pairs disposed to face each other in spaced parallel relation in a reduced pressure treating chamber, and between which a radio frequency current power is applied to produce a plasma, is formed from preferably highly pure aluminium or an aluminium alloy, and has a chromic acid anodic surface film layer thereon. It has greatly improved durability when used for plasma treatment in the presence of fluorine containing gas.