| 摘要 |
PURPOSE:To prevent lowering of characteristics of a solar battery due to lowering of series resistance by forming a transparent conductive film on a transparent base member, and then forming a film with lowered fluorine concentration thereon. CONSTITUTION:Soda-lime glass is sufficiently cleaned and dried and a transparent electrode is formed on a glass substrate 1. Namely, a tin oxide film 2 (SnO2:F) doped with fluorine is formed by CVD process while the mixing ratio of water vapor and tin tetrachloride and the heating temperature of the glass are being changed. Then, as an overcoat film 3, an SnO2 film, whose chlorine concentration at the surface layer thereof is made not larger than 0.1wt.% by that the water vapor amount is changed to dissociate the chlorine in the tin tetrachloride to reduce residual chlorine amount, is formed to form a two- layer film of SnO2:F/SnO2. Thus, a low-resistance high-transmissivity transparent conductive base member with improved durability against reducing plasma can be obtained, and when this is used as a solar battery substrate, the lowering of the solar battery characteristics can be prevented. |
