发明名称 |
Electric probing test machine |
摘要 |
An electric probing test machine including a test stage unit which is constructed as an independent component of at least one system and used to test the electrical characteristics of a wafer by having the wafer on the stage contacted by a multitude of probes and a loading/unloading unit which is constructed as an independent component of at least one system and used to bring a wafer from a wafer cassette to the stage of the test stage unit or from the stage of the test stage unit to the wafer cassette. The loading/unloading unit is combined with the test stage unit in such a way that the loading/unloading unit can be separated and moved away from the test stage unit.
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申请公布号 |
US4950982(A) |
申请公布日期 |
1990.08.21 |
申请号 |
US19900471696 |
申请日期 |
1990.01.26 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
OBIKANE, TADASHI;KOIKE, HISASHI;TANAKA, SUMI |
分类号 |
G01R31/28;H01L21/66 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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