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经营范围
发明名称
PROBE DEVICE
摘要
申请公布号
JPH02210269(A)
申请公布日期
1990.08.21
申请号
JP19890214464
申请日期
1989.08.21
申请人
TOKYO ELECTRON LTD
发明人
IKEDA TORU
分类号
G01R1/073;H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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