| 摘要 |
<p>PURPOSE:To allow the inspection of the disconnection and the short-circuiting of gate wirings in the state held connected to bus lines by impressing a chemical conversion voltage to each of plural pieces of anodic oxidation electrodes formed in correspondence to plural groups, thereby executing anodic oxidation. CONSTITUTION:The gate wirings (gate electrodes) 11, the 1st bus line 12 for anodic oxidation of the gate wirings 11 located in odd number positions, the 2nd bus line 13 for anodic oxidation of the gate wirings located in even number position, and pads 14, 15 for connection to an external power source (anode side) are provided. Plural pieces of the gate wirings 11 are grouped in such a manner that the adjacent gate wires are not included in the same groups and the anodic oxidation is executed by impressing the chemical conversion voltages to the respective anodic oxidation electrodes formed in correspondence to the respective groups. The inspection of the disconnection and short-circuiting of the gate wirings 11 is possible in this way even if the bus lines 12, 13 for the anodic oxidation are held connected.</p> |
