| 摘要 |
PURPOSE:To make a discharge current uniform in density so as to increase a laser output by a method wherein two or more protrusions are regularly arranged on the inner wall of a discharge tube between discharge electrodes to induce turbulence in a laser gas flow. CONSTITUTION:Two or more rectangular protrusions 13 are arranged on the inner wall of a discharge tube 3 between discharge electrodes in such a state that they are located in parallel with the major axial direction of the discharge tube 3. The discharge tube 3 makes laser gas which flows in from a gas inlet 9 ionized through a glow discharge. And, two or more rectangular protrusions 19 are arranged in a circumferential direction of the discharge tube 3 at a constant interval as being tilted against an axial direction by a degree of theta. Then, the protrusions 19 induce turbulence in the discharge tube 3 to make a laser gas flow uniform and improve the discharge tube 3 in cooling effect to enable an arc discharge to hardly happen, so that a laser output increases. |
