| 摘要 |
PURPOSE:To reduce the discharge part of a laser tube which extends from an intermediate section to a cathode in shrinkage so as to improve laser gas in utilization efficiency by a method wherein the cathode and an anode are provided to both the end faces of a laser tube respectively, and pin-like auxiliary electrode are arranged along an intermediate section between the electrodes, and resistors are interposed between the auxiliary electrodes and the other electrodes. CONSTITUTION:Pin-like anode 13 are provided on the part of a laser tube 3 of an axial flow type gas laser 1 on a gas inlet 9 side at regular intervals, and ring-shaped cathodes 15 are provided on a gas outlet 11 side at regular intervals. And, two or more pin-like auxiliary electrodes 17 are arranged at a constant interval on the intermediate section of the laser tube 3 along its circumference, series resistors R1 and R2 are connected between the auxiliary electrodes 17 and the anodes 13, and a discharge power source E is connected between the ring-shaped cathode 15 and a connection point 19 of the resistors R1 and R2. And, a potential at the position of the auxiliary electrodes 17 is made high through the resistors R1 and R2, the discharge part of the laser tube 3 extending from the intermediate section to the cathodes 15 is reduced in shrinkage, and a laser gas is improved in utilization efficiency. |
