| 摘要 |
<p>PURPOSE:To enable the optional combination and arrangement of wafers by connecting five sets of tweezers installed in correspondence to respective wafer storage pitches, to an evacuation line via respective solenoid valves, turning these solenoid valves on or off independently, and shortening a span of transfer time. CONSTITUTION:Tweezers 1a, 1b, 1c, 1d and 1e are connected each to an evacuation line 6 via respective solenoid valves 11a, 11b, 11c, 11d and 11e. In addition, the solenoid valves 11a-11e are electrically connected to a controller 12, and turned on or off independently by a driving signal out of this controller 12. With the solenoid valves turned on, the tweezers are interconnected to the evacuation line 6, and released to atmospheric pressure by its off. Each solenoid valve is properly operated by the controller 12 whereby optional sheets of wafers 7 can be attracted and held or released.</p> |
