发明名称 OPTICAL WINDOW MEMBER AND ITS MANUFACTURE
摘要 PURPOSE:To obtain an inexpensive optical window material which can be made large in area by forming a diamond thin film on one surface of a substrate and then removing a substrate part by etching, and thus forming a diamond single-layer area. CONSTITUTION:The optical window material consists of the substrate 1 which has many hole parts and the diamond film 2 which covers the hole parts formed in one surface of the substrate 1. Namely, the diamond thin film 2 is formed on one surface of the substrate 1 and then the other surface of the substrate 1 is coated with resist; and a pattern which exposes and substrate 1 partially is formed, and the exposed part of the substrate 1 is removed by etching to form the diamond single-layer area partially. Consequently, the optical window member made of diamond can be made large in area to reduce the raw material cost and manufacture cost.
申请公布号 JPH02208601(A) 申请公布日期 1990.08.20
申请号 JP19890029165 申请日期 1989.02.08
申请人 SEIKO INSTR INC 发明人 NISHIKAWA AKIRA
分类号 G01N23/00;C03C17/22;G01J3/02;G01N21/01;G02B1/10;G02B5/00;G02B5/20 主分类号 G01N23/00
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