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发明名称
VAPOR PHASE GROWING DEVICE
摘要
申请公布号
JPH02209486(A)
申请公布日期
1990.08.20
申请号
JP19890031572
申请日期
1989.02.10
申请人
FUJITSU LTD
发明人
IKEDA KAZUTO
分类号
C01B13/20;C01G1/00;C23C16/54;H01L39/24
主分类号
C01B13/20
代理机构
代理人
主权项
地址
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