发明名称 ANORDNING OCH FOERFARANDE FOER BEHANDLING AV INNERVAEGGEN I ETT ROER MEDELST EN ELEKTRISK GLIMURLADDNING
摘要 To be able to treat the inside surface of metallic tubes by means of an electric glow discharge at pressures lower than heretofore in order to heat or coat such a surface, for example, an auxiliary electrode is positioned inside an article to be treated such as a tube extending close to the tube wall and parallel to the tube axis, with the auxiliary electrode and the tube being rotatable relative to each other. The apparatus and method are primarily for coating the inside of tubes.
申请公布号 SE462717(B) 申请公布日期 1990.08.20
申请号 SE19840002504 申请日期 1984.05.09
申请人 BALZERS AG 发明人 E * MOLL;R * BUHL
分类号 C23F4/00;C23C14/04;C23C14/32;C23C14/34;H01J37/34;H05B7/16 主分类号 C23F4/00
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