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发明名称
HEAT-TREATING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02207533(A)
申请公布日期
1990.08.17
申请号
JP19890028185
申请日期
1989.02.07
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KOYAMA KUMIKO;OTA TOSHIMICHI;INADA MASAKI
分类号
H01L21/265;H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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